Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6562465 | Coating liquid for forming a silica-containing film with a low-dielectric constant and substrate coated with such a film | Akira Nakashima, Michio Komatsu | 2003-05-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6562465 | Coating liquid for forming a silica-containing film with a low-dielectric constant and substrate coated with such a film | Akira Nakashima, Michio Komatsu | 2003-05-13 |