GB

Gerd Benner

LG Leo Elektronenmikroskopie Gmbh: 2 patents #1 of 4Top 25%
Overall (2003): #67,147 of 273,478Top 25%
2
Patents 2003

Issued Patents 2003

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
6657211 Process for electron beam lithography, and electron-optical lithography system — 2003-12-02
6531698 Particle-optic illuminating and imaging system with a condenser-objective single field lens — 2003-03-11