Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6606234 | Electrostatic chuck and method for forming an electrostatic chuck having porous regions for fluid flow | — | 2003-08-12 |
| 6603650 | Electrostatic chuck susceptor and method for fabrication | Morteza Zandi | 2003-08-05 |