Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660606 | Semiconductor-on-insulator annealing method | Hiroshi Miyabayashi, Nobuhiko Sato | 2003-12-09 |
| 6639327 | Semiconductor member, semiconductor device and manufacturing methods thereof | Kazutaka Momoi, Takao Yonehara, Nobuhiko Sato, Noriaki Honma | 2003-10-28 |
| 6613638 | Soi annealing method for reducing HF defects, with lamp, without crystal original particle (COP) | — | 2003-09-02 |
| 6613676 | Process of reclamation of SOI substrate and reproduced substrate | Takao Yonehara | 2003-09-02 |
| 6566255 | SOI annealing method and SOI manufacturing method | — | 2003-05-20 |