Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6551172 | Polishing apparatus and polishing method | Mikichi Ban, Takehiko Suzuki, Yasushi Sugiyama | 2003-04-22 |
| 6503361 | Polishing method and polishing apparatus using the same | Mikichi Ban | 2003-01-07 |