Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6670620 | Electron gun, illumination apparatus using the electron gun, and electron beam exposure apparatus using the illumination apparatus | — | 2003-12-30 |
| 6617595 | Multi-lens type electrostatic lens, electron beam exposure apparatus and charged beam applied apparatus using the lens, and device manufacturing method using these apparatuses | — | 2003-09-09 |
| 6515640 | Electron emission device with gap between electron emission electrode and substrate | Takeo Tsukamoto, Mamoru Miyawaki, Tetsuya Kaneko, Akira Suzuki, Isamu Shimoda +1 more | 2003-02-04 |