Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6654668 | Processing apparatus, processing system, distinguishing method, and detecting method | Hisakazu Nakayama, Jun Ookura | 2003-11-25 |
| 6644965 | Substrate processing apparatus and substrate processing method | Jun Ookura | 2003-11-11 |
| 6571372 | Method and apparatus for measuring and designing electric circuit based on two-port network thereof, and computer-readable recording medium for recording the same | — | 2003-05-27 |