Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6649020 | Plasma processing apparatus | Ryuji Okamura, Tatsuyuki Aoike, Toshiyasu Shirasuna, Kazuhiko Takada, Kazuyoshi Akiyama | 2003-11-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6649020 | Plasma processing apparatus | Ryuji Okamura, Tatsuyuki Aoike, Toshiyasu Shirasuna, Kazuhiko Takada, Kazuyoshi Akiyama | 2003-11-18 |