Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6654101 | EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD INCLUDING CHANGING A PHOTO-INTENSITY DISTRIBUTION OF A LIGHT SOURCE AND ADJUSTING AN ILLUMINANCE DISTRIBUTION ON A SUBSTRATE IN ACCORDANCE WITH THE CHANGE | Miyoko Kawashima | 2003-11-25 |
| 6564572 | Absorption refrigerator | Tomoyuki Uchimura, Toshio Matsubara, Tomoyoshi Irie | 2003-05-20 |
| 6534242 | Multiple exposure device formation | Mitsuro Sugita, Miyoko Kawashima, Kenji Saitoh, Yuichi Iwasaki | 2003-03-18 |