Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6586785 | Aerosol silicon nanoparticles for use in semiconductor device fabrication | Richard C. Flagan, Elizabeth Boer, Michele Ostraat, Harry A. Atwater | 2003-07-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6586785 | Aerosol silicon nanoparticles for use in semiconductor device fabrication | Richard C. Flagan, Elizabeth Boer, Michele Ostraat, Harry A. Atwater | 2003-07-01 |