Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6538387 | Substrate electrode plasma generator and substance/material processing method | Shunichi Seki, Tatsuya Shimoda, Kazuo Terashima | 2003-03-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6538387 | Substrate electrode plasma generator and substance/material processing method | Shunichi Seki, Tatsuya Shimoda, Kazuo Terashima | 2003-03-25 |