Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6530732 | Single substrate load lock with offset cool module and buffer chamber | Victor J. Theriault | 2003-03-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6530732 | Single substrate load lock with offset cool module and buffer chamber | Victor J. Theriault | 2003-03-11 |