Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6596147 | Methods of overplating surfaces of microelectromechanical structure | Edward A. Hill, Ramaswamy Mahadevan | 2003-07-22 |
| 6590313 | MEMS microactuators located in interior regions of frames having openings therein and methods of operating same | Vivek Agrawal, Ramaswamy Mahadevan | 2003-07-08 |
| 6535318 | Integrated optoelectronic devices having pop-up mirrors therein and methods of forming and operating same | Edward A. Hill | 2003-03-18 |
| 6522452 | Latchable microelectromechanical structures using non-newtonian fluids, and methods of operating same | — | 2003-02-18 |
| 6511463 | Methods of fabricating microneedle arrays using sacrificial molds | Henry A. Wynands, Karen W. Markus | 2003-01-28 |