Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6607633 | Plasma generating device and plasma processing apparatus comprising such a device | — | 2003-08-19 |
| 6566988 | Stacked type dielectric resonator | Yasuhiko Muzutani, Takami Hirai, Kazuyuki Mizuno | 2003-05-20 |