Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6656023 | In situ control with lubricant and tracking | — | 2003-12-02 |
| 6641463 | Finishing components and elements | — | 2003-11-04 |
| 6634927 | Finishing element using finishing aids | — | 2003-10-21 |
| 6568989 | Semiconductor wafer finishing control | — | 2003-05-27 |
| 6551933 | Abrasive finishing with lubricant and tracking | — | 2003-04-22 |
| 6541381 | Finishing method for semiconductor wafers using a lubricating boundary layer | — | 2003-04-01 |