Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6540883 | Magnetron sputtering source and method of use thereof | Hans Hirscher, Walter Haag, Walter Albertin | 2003-04-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6540883 | Magnetron sputtering source and method of use thereof | Hans Hirscher, Walter Haag, Walter Albertin | 2003-04-01 |