Richard J. Rzeszut

AT Axcelis Technologies: 1 patents #20 of 51Top 40%

📍 Billerica, MA: #10 of 56 inventorsTop 20%

🗺 Massachusetts: #1,861 of 6,881 inventorsTop 30%

Overall (2003): #133,822 of 273,478Top 50%

Patents 2003

Issued Patents 2003

Showing 1–1 of 1 patents

Patent #	Title	Co-Inventors	Date
6515290	Bulk gas delivery system for ion implanters	James P. Quill	2003-02-04