AH

Alfred Mike Halling

📍 Wenham, MA: #4 of 6 inventorsTop 70%
🗺 Massachusetts: #1,861 of 6,881 inventorsTop 30%
Overall (2003): #266,690 of 273,478Top 100%
1
Patents 2003

Issued Patents 2003

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6600163 In-process wafer charge monitor and control system for ion implanter — 2003-07-29