Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6520348 | Multiple inclined wafer holder for improved vapor transport and reflux for sealed ampoule diffusion process | Robert L. Mcanally, Michael Geva, Gustav E. Derkits, Jr., Robert A. Resta | 2003-02-18 |