Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6591162 | Smart load port with integrated carrier monitoring and fab-wide carrier management system | — | 2003-07-08 |
| 6579052 | SMIF pod storage, delivery and retrieval system | Anthony C. Bonora, Robert Netsch, Joshua T. Oen, Terry Mosier, William J. Fosnight | 2003-06-17 |