Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6623895 | Hybrid phase-shift mask | Roger Caldwell, Thomas Laidig, Kurt E. Wampler | 2003-09-23 |
| 6541167 | Optical proximity correction | John S. Petersen | 2003-04-01 |
| 6519760 | Method and apparatus for minimizing optical proximity effects | Xuelong Shi, Stephen Hsu | 2003-02-11 |