Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6669779 | Yield and line width performance for liquid polymers and other materials | Ed C. Lee, Murthy Krishna, Reese Reynolds, John Salois, Royal Cherry | 2003-12-30 |
| 6662466 | Method for two dimensional adaptive process control of critical dimensions during spin coating process | Tom Zhong, John Lewellen, Eddie Lee | 2003-12-16 |