Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6662817 | Gas-line system for semiconductor-manufacturing apparatus | Takayuki Yamagishi | 2003-12-16 |
| 6630053 | Semiconductor processing module and apparatus | Takayuki Yamagishi, Takeshi Watanabe | 2003-10-07 |