Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6632279 | Method for growing thin oxide films | Antti Rahtu, Markku Leskelä, Kaupo Kukli | 2003-10-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6632279 | Method for growing thin oxide films | Antti Rahtu, Markku Leskelä, Kaupo Kukli | 2003-10-14 |