Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6613685 | Method for supporting a semiconductor wafer during processing | Frank Huussen | 2003-09-02 |
| 6607602 | Device for processing semiconductor wafers | Albert Hasper, Jan Zinger | 2003-08-19 |
| 6560896 | Apparatus, method and system for the treatment of a wafer | Vladimir Kuznetsov, Gert-Jan Snijders | 2003-05-13 |