Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6608287 | Process chamber with rectangular temperature compensation ring | Derrick W. Foster | 2003-08-19 |
| 6572924 | Exhaust system for vapor deposition reactor and method of using the same | — | 2003-06-03 |