Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6670038 | Method of depositing particles with an electrostatic chuck | Timothy Allen Pletcher | 2003-12-30 |
| 6592671 | Apparatus for clamping a planar substrate | Bogdan Brycki | 2003-07-15 |
| 6511712 | Methods using dry powder deposition apparatuses | Eugene S. Poliniak, Nitin V. Desai, Nalin Kumar, William R. Roach, Lawrence Harrison Hammer +6 more | 2003-01-28 |