Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6611317 | Exposure apparatus, semiconductor device, and photomask | Tohru Ogawa, Hideo Hosono, Shinya Kikugawa, Yoshiaki Ikuta, Noriaki Shimodaira +1 more | 2003-08-26 |
| 6576578 | Synthetic quartz glass and method for preparing the same | Yoshiaki Ikuta, Shinya Kikugawa, Noriaki Shimodaira, Shuhei Yoshizawa | 2003-06-10 |
| 6544914 | Synthetic quartz glass for optical member, process for producing the same, and method of using the same | Shinya Kikugawa, Yoshiaki Ikuta, Noriaki Shimodaira, Shuhei Yoshizawa | 2003-04-08 |