Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6528767 | Pre-heating and load lock pedestal material for high temperature CVD liquid crystal and flat panel display applications | Ericka M. Ramirez, Stephen C. Wolgast | 2003-03-04 |
| 6510888 | Substrate support and method of fabricating the same | Naomi Matsumura, Masahiko Kowaka, Akira Terashi, Hideaki Kondo | 2003-01-28 |