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Oliver Kienzle

CG Carl Zeiss Smt Gmbh: 1 patents #2 of 19Top 15%
Overall (2003): #147,292 of 273,478Top 55%
1
Patents 2003

Issued Patents 2003

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6642525 Particle-optical component and system comprising a particle-optical component Holger Weigand 2003-11-04