Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6652368 | Chemical mechanical polishing carrier head | Michael Sherwood, Harry Q. Lee | 2003-11-25 |
| 6513848 | Hydraulically actuated wafer clamp | John Hearne, Bryan Von Lossberg | 2003-02-04 |