Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6605394 | Organic bottom antireflective coating for high performance mask making using optical imaging | Jeffrey Albelo | 2003-08-12 |
| 6582861 | Method of reshaping a patterned organic photoresist surface | Alex Buxbaum | 2003-06-24 |