Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6617228 | Semiconductor material and method for enhancing solubility of a dopant therein | Babak Sadigh, Thomas Lenosky, Tomas Rubia, Martin D. Giles, Maria-Jose Caturla +4 more | 2003-09-09 |
| 6583018 | Method of ion implantation | Yasuhiko Matsunaga | 2003-06-24 |