Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6579796 | Method of etching platinum using a silicon carbide mask | Chentsau Ying, Luc Van Autryve | 2003-06-17 |
| 6541380 | Plasma etching process for metals and metal oxides, including metals and metal oxides inert to oxidation | Chentsau Ying | 2003-04-01 |