Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6511538 | Film deposition method and apparatus for semiconductor devices | Yuichi Wada, Hiroyuki Yarita, Naomi Yoshida | 2003-01-28 |
HA
Hisashl Aida
Overall (2003): #213,460 of 273,478Top 80%
1
Patents 2003