Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6580967 | Method for providing distributed material management and flow control in an integrated circuit factory | Raja Sunkara | 2003-06-17 |
| 6519498 | Method and apparatus for managing scheduling in a multiple cluster tool | Mark T. Pool, Raja Sunkara | 2003-02-11 |