Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6635114 | High temperature filter for CVD apparatus | Jun Zhao, Frank Chang, Xiaoliang Jin, Po Tang | 2003-10-21 |
| 6616767 | High temperature ceramic heater assembly with RF capability | Jun Zhao, Talex Sajoto, Harold Mortensen, Richard Palicka | 2003-09-09 |
| 6527865 | Temperature controlled gas feedthrough | Talex Sajoto, Leonid Selyutin, Jun Zhao, Vincent Ku, Xiao Liang Jin | 2003-03-04 |