Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6671570 | System and method for automated monitoring and assessment of fabrication facility | — | 2003-12-30 |
| 6587744 | Run-to-run controller for use in microelectronic fabrication | Kevin Stoddard, Konstantinos Tsakalis | 2003-07-01 |