Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6664496 | Plasma processing system | Shinya Hasegawa, Yoichiro Numasawa, Yukito Nakagawa | 2003-12-16 |
| 6503816 | Thin film formation by inductively-coupled plasma CVD process | Norikazu Ito, Akihisa Matsuda, Michio Kondo | 2003-01-07 |