Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6599763 | Wafer randomization and alignment system integrated into a multiple chamber wafer processing system | Jose Carlos Reyes, Toby J. Winters | 2003-07-29 |
| 6596109 | Unitary multi-component filter media | James M. Posa | 2003-07-22 |
| 6536483 | Large wire loop filters and mechanical dampers | Steven Zettel | 2003-03-25 |
| 6504225 | Teos seaming scribe line monitor | David Cooper, Denise C. Sale | 2003-01-07 |