Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6544842 | Method of forming hemisphere grained silicon on a template on a semiconductor work object | Guoqing Chen | 2003-04-08 |
| 6521507 | Selective deposition of undoped silicon film seeded in chlorine and hydride gas for a stacked capacitor | Randhir P. S. Thakur | 2003-02-18 |