Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6642066 | Integrated process for depositing layer of high-K dielectric with in-situ control of K value and thickness of high-K dielectric layer | Arvind Halliyal | 2003-11-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6642066 | Integrated process for depositing layer of high-K dielectric with in-situ control of K value and thickness of high-K dielectric layer | Arvind Halliyal | 2003-11-04 |