Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6593168 | Method and apparatus for accurate alignment of integrated circuit in flip-chip configuration | Travis D. Kirsch, Chris Wooten | 2003-07-15 |
| 6522776 | Method for automated determination of reticle tilt in a lithographic system | — | 2003-02-18 |