Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6574359 | Method and apparatus for inspecting wafer defects | — | 2003-06-03 |
| 6524869 | Method and apparatus for detecting ion implant induced defects | Michael J. Satterfield, Laura Pressley, Terri A. Couteau, Daniel E. Sutton, David M. Hendrix | 2003-02-25 |
| 6507933 | Automatic defect source classification | Travis D. Kirsch, Carroll W. Webb | 2003-01-14 |