Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6627484 | Method of forming a buried interconnect on a semiconductor on insulator wafer and a device including a buried interconnect | — | 2003-09-30 |
| 6589860 | System and method for calibrating electron beam defect inspection tool | Kenneth R. Harris, Samantha Lee | 2003-07-08 |