Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6667231 | Method of forming barrier films for copper metallization over low dielectric constant insulators in an integrated circuit | — | 2003-12-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6667231 | Method of forming barrier films for copper metallization over low dielectric constant insulators in an integrated circuit | — | 2003-12-23 |