Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6635589 | Methods of heat treatment and heat treatment apparatus for silicon oxide films | Shunpei Yamazaki, Yasuhiko Takemura, Mitsunori Sakama, Tomohiko Sato, Satoshi Teramoto | 2003-10-21 |