Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6635185 | Method of etching and cleaning using fluorinated carbonyl compounds | Timothy R. Demmin, Matthew H. Luly | 2003-10-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6635185 | Method of etching and cleaning using fluorinated carbonyl compounds | Timothy R. Demmin, Matthew H. Luly | 2003-10-21 |