Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6656532 | Layered hard mask and dielectric materials and methods therefor | — | 2003-12-02 |
| 6652922 | Electron-beam processed films for microelectronics structures | Neil H. Hendricks, Dong Kyu Choi | 2003-11-25 |