Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6668618 | Systems and methods of monitoring thin film deposition | Herbert L. Ko, Richard K. Karlquist, Mark A. Hueschen, Kent W. Carey | 2003-12-30 |
| 6651488 | Systems and methods of monitoring thin film deposition | Herbert L. Ko, Richard K. Karlquist, Mark A. Hueschen, Kent W. Carey | 2003-11-25 |
| 6617249 | Method for making thin film bulk acoustic resonators (FBARS) with different frequencies on a single substrate and apparatus embodying the method | Richard C. Ruby, Paul Bradley | 2003-09-09 |
| 6566979 | Method of providing differential frequency adjusts in a thin film bulk acoustic resonator (FBAR) filter and apparatus embodying the method | Richard C. Ruby, Paul Bradley | 2003-05-20 |
| 6550664 | Mounting film bulk acoustic resonators in microwave packages using flip chip bonding technology | Paul Bradley, Richard C. Ruby | 2003-04-22 |
| 6542055 | Integrated filter balun | Michael Frank | 2003-04-01 |